BS EN 62047-14:2012 pdf download – Semiconductor devices — Micro-electromechanical devices Part 1 4: Forming limit measuring method of metallic film materials This part of lEC 62047 describes definitions and procedures for measuring the forming limit ofmetallic film materials with a thickness range from 0,5 um to 300 um. The metallic filmmaterials described herein are typically used in electric components，MEMS and micro-devices. When metallic film materials used in MEMS(see 2.1.2 of lEC 62047-1:2005) are fabricated bya forming process such as imprinting, it is necessary to predict the material failure in order toincrease the reliability of the components. Through this prediction，the effectiveness ofmanufacturing MEMS components by a forming process can also be improved, because theperiod of developing a product can be reduced and manufacturing costs can thus bedecreased. This standard presents one of the prediction methods for material failure inimprinting process. 2Normative references The following documents, in whole or in part, are normatively referenced in this document andare indispensable for its application.For dated references,only the edition cited applies. Forundated references, the latest edition of the referenced document(including anyamendments) applies. IEC 62047-1:2005,Semiconductor devices – Micro-electromechanical devices – Part 1:Terms and definitions 3 Terms, definitions and symbols 3.1 Terms and definitions For the purposes of this document,the terms and definitions given in IEC 62047-1 and thefollowing apply. 3.1.1 circular grid grid used for measuring the localized deformation of the specimens within the circle 3.1.2 grid patterns pattern marked on the surface of the testing material permitting immediate and directmeasurement of the formability for the metallic film materials Note 1 to entry The grid consists of a pattern of small circles or rectangles. 3.1.3 major axis longest line of the deformed elliptical shape,which passes through both focuses of the ellipse 4 Testing method 4.1 General The forming limit diagram (FLD) is determined by pressing the micro film material using a hemispherical punch. This pressing process is performed until the film material fractures. The major and minor strains of a deformed specimen can be measured in many ways, for example, by using a digital camera module or an optical device. However, using a digital camera module with sufficient resolution and a high magnifying power lens is recommended. NOTE See Annex A for principles of forming limit diagram. 4.2 Equipment Micro press equipment is utilized as the loading equipment for FLD tests as described in Figure 1 . A hemispherical punch is attached to the micro...
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