BS IEC 62047-41:2021 pdf download – Semiconductor devices – Micro- electromechanical devices Part 41: RF MEMS circulators and isolators d) The network analyser should be pre-set and set up to the standard S-parameters measurement class, where selecting the transmission measurements (S 21 , S 32 and S 1 3 ): 1 ) Specify the frequency range of the signal source, which is the span of frequency for making a device measurement, including start frequency, stop frequency, number of measurement points, etc.; 2) Specify the frequency sweep type of the signal source, using linear frequency sweep type typically; 3) Specify the power level of the signal source to proper value; 4) Specify the display format, usually using “Log Mag” display format. e) Perform measurement: 1 ) Scale the displayed measurement for optimum viewing; 2) Read the S-parameter (S 21 , S 32 and S 1 3 ) values. Each parameter values at each frequency point are the insertion loss: L ins(21 ) = S 21 , L ins(32) = S 32 and L ins(1 3) = S 1 3 . 5.2.5.2 Method B): with the 2-port network analyser, the measurement procedures are as follows: a) The RF MEMS circulator/isolator should be suitably packaged and mounted on a test fixture; b) The test fixture, the network analyser, cable, and connectors should be calibrated before performing measurement; c) The test fixture should be connected to the network analyser using the test cable with 50 Ω connectors. For circulators, connected as shown in Figure 6 a); for isolators, connected as shown in Figure 7; d) The network analyser should be pre-set and set up to the standard S-parameters measurement class, where selecting the transmission measurements (S 21 ): 1 ) Specify the frequency range of the signal source, which is the span of frequency for making a device measurement, including start frequency, stop frequency, number of measurement points, etc.; 2) Specify the frequency sweep type of the signal source, using linear frequency sweep type typically; 3) Specify the power level of the signal source to proper value; 4) Specify the display format, usually using “Log Mag” display format. e) Perform measurement: 1 ) Scale the displayed measurement for optimum viewing; 2) Read the S-parameter (S 21 ) values. Each parameter values at each frequency point are the insertion loss: L ins(21 ) = S u . f) Measuring insertion loss L ins(1 3) :...

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