BS IEC 62047-32:2019 pdf download – Semiconductor devices — Micro- electromechanical devices Part 32: Test method for the nonlinear vibration of MEMS resonators This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators. The statements made in this document apply to the development and manufacture for MEMS resonators. 2 Normative references The following documents are referred to in the text in such a way that some or all of their content constitutes requirements of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (inclu ding any amendments) applies. IEC 62047-1 , Semiconductor devices – Micro-electromechanical devices – Part 1: Terms and definitions 3 Terms and definitions For the purposes of this document, the terms and definitions given in IEC 62047-1 and the following apply. • IEC Electropedia: available at http://www.electropedia.org/ • ISO Online browsing platform: available at http://www.iso.org/obp 3.1 nonlinear vibration vibration whose displacement has a nonlinear relationship with the elastic restoring force, with the change of the vibration amplitude 3.2 nonlinear jump jump phenomenon of the frequency response curve when the vibration amplitude exceeds a certain threshold 3.3 frequency deviation deviation of the vibration frequency of the resonator in a closed-loop system from the natural frequency of the resonator 4 Test parameters of nonlinear vibration of the resonators Test parameters of nonlinear vibration of the resonators are: a) amplitude-frequency response of the nonlinear vibration, ( ) A ω ; b) phase-frequency response of the nonlinear vibration, ( ) P ω ; 5.2 Test conditions a) Keep the ambient temperature within 23 °C ± 5 °C. b) Maintain the vacuum degree of the vacuum chamber according to the actual operation of the resonator. c) Adjust the micro-optical apparatus to restrict the laser spot within the surface of the resonator. d) For transparent resonators, the laser beam should illuminate on the metal layer on the resonator to enhance the reflected laser intensity. e) The connection of the resonator, the installing base and the vacuum chamber should be strong enough. f) For out-of-plane vibrating resonators, the surface of the installing base should be parallel to the horizontal plane. For in-plane vibrating resonators, the surface of the installing base should be set to a certain angle about the horizon level, to ensure enough intensity of the reflected laser into the detector. g) The...
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